Product description
Izovac Beam Sputtering System (IBSS) is a highly effective instrument for
the thin films deposition with variable composition and physical properties.
The IBSS forms a sputtering flow of material from the planar targets in the
argon, oxygen, nitrogen, and freon atmospheres, as well as in the mixtures of these
gases.
IPS-I 5K Power supply
IBSS is supplied with original power supply unit IPS–I 5K. The power
supply is specifically designed to ensure the most effective operation of the
IBSS and IBCS. The design also provides a unique opportunity to effectively realize power
distribution to the number of technological devices from the single power supply
unit (please see the connection sketch), with one output configured for ion
beam sputtering system IBSS, and another for ion beam cleaning system IBCS.
Key Advantages and Features
Izovac Beam Sputtering System
- Sputtering of the conducting, semiconducting and dielectric materials;
- The temperature of the substrate does not exceed 60°C (140°F);
- Opportunity to sequentially sputter several different materials in one
process;
- Large dynamic range of sputtering rates: (1 Å/sec – 10 Å
/sec);
- Very smooth surface of the thin films;
- High density of the film's structure;
- Homogenous content of the composite films;
- Opportunity to sputter targets with maximum length of up to 3360 mm;
- Thin film uniformity is not worse than ±2% along the sputtered
area;
- Reliable continuous operation;
- Stability of reactive sputtering processes;
- Operation with noble gases (Ar, He, Ne, etc.), and active gases (O2,
N2, CFx, CxHy, etc.)
- Oblique sputtering.
IPS-I 5K Power Supply
- Effective power switch for IBSS and IBCS;
- Power, current and voltage regulation modes;
- User-friendly control from the front panel, through the serial digital interface RS-232/RS-485, and through I/O channels;
- Standard 19” rack mount;
- Microprocessor control;
- Original arc control and short circuit protection systems ensure almost
non-interruptible operation of the vacuum deposition equipment;
- Maximum power 5 kW;
- Power mains 170-230/360-420 VAC, 3 phase, 4 wire, 50-60 Hz;
- CE compliant.
Application
Izovac Beam Sputtering System is especially valuable in the following areas
of application:
- Flat Panel Displays (OLED)
- Coating of heat-sensitive substrates
- Precision optical coatings
- Wear-resistant coatings
- Ultra thin coatings (nanotechnology)
Technical data
Source type: closed drift accelerator with anode layer.
Working gases: Ar, N2, H2, O2, CH, CO, CF,
NH, air etc.
Ion energy: 400 eV - 2500 eV.
Ion beam current: 40 mA - 1500 mA.
IBSS dimensions
Depending on the requirements, the length of the ion source can vary from 140 mm to 3500 mm.
Parameters |
IPS-I 5K Power Supply |
| Source voltage |
170-230/360-420 VAC, 3 φ, 4 wire, 50-60 Hz |
| Dimensions |
482,6 mm (W) x 266 mm (H) x 512 mm (L);
19” (W) x 10,47” (H) x 20,16” (L) |
| Weight |
37 kg |
| Cooling |
Water cooled, 5°C to 18°C |
| Ambient Temperature and Humidity |
0-40°C, 30% to 80% relative humidity |
| |
IBSS output |
IBCS output |
| Output power |
5 kW |
2,5 kW |
| Output voltage |
Maximum 5 kV |
Maximum 2,5 kV |
| Output current |
Maximum 1 A |
Maximum 1 A |
Please contact Izovac for more information on the configuration options and quote request:
Send Request
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