Product Description

IzoMag Sputtering System is an effective instrument for the thin film deposition of metals, alloys, oxides and nitrides. Original dual magnetron sputtering technology offers an opportunity to work in AC mode with frequencies 40-80 kHz and in DC mode.

IPS-M 6K Power Supply

IzoMag is supplied with original power supply unit IPS–M 6K. The power supply is specifically designed to ensure the most effective operation of the dual magnetron and provide 40-80 kHz power supplies featuring original arc control and short circuit protection systems. The design also features a unique opportunity to effectively realize power switching between the number of technological devices from the single power supply unit (please see the sketch), with one output configured for dual magnetron sputtering system IzoMag, and another for ion beam cleaning system IBCS. Also, when used together with external rectifier unit, the IPS-M 6K Power Supply can be configured for operation with magnetron sputtering unit in DC mode.

Key Advantages and Features

IzoMag Dual Magnetron Sputtering System

• Operation with up to four different materials in one cycle in DC mode;
• Sequential alternation of different layers with low and high index of refraction;
• Deposition of alloys with variable composition simultaneously from two metal targets in DC mode;
• Opportunity to sputter targets with maximum length up to 1646 mm;
• Thin film uniformity is not worse than ±5% along the substrate’s surface;
• Reliable continuous operation.

IPS-M 6K Power Supply

• Effective power switch between IzoMag and IBCS;
• Power, current and voltage regulation modes;
• User-friendly control from the front panel, through the serial digital interface RS-232, and through I/O channels.
• Standard 19” rack mount;
• Microprocessor control;
• Original arc control and short circuit protection systems ensure almost non-interruptible operation of the vacuum deposition equipment.
• Opportunity to operate with DC magnetron when used with external rectifier unit.

Application

IzoMag Dual Magnetron Sputtering System is especially effective in the following areas of application:

• High quality optical coatings for display application;
• Decorative coatings;
• Large area coatings;
• Hard and wear-resistant coatings;
• Optical coatings;
• Protective coatings.

Technical Data

Source type: planar dual magnetron
Working gases: Ar, O₂, N₂, etc.
Sputtering power: up to 6kW
Operating pressure: 2x10^-1 Pa … 2x10⁰Pa
Cooling of target: indirect

IzoMag dimensions

Length - 838 mm (target increase maximum up to 1646 mm).
Width – 457 mm.
Height – 138 mm.