Description
The MICRON-5 quartz control system is designed to control thin film thickness during vacuum deposition processes. The device is equipped with keyboard and LCD indicator.
Features
Physical effect of changing the resonance frequency of quartz crystal with changing of crystal weight was chosen to measure film thickness. The crystal weight increases when sputtering material is deposited on the crystal.
Technical specifications
| Frequency resolution ratio |
1 Hz |
| Measuring range |
4 – 10 MHz |
| Measuring period |
1 second |
| Measuring accuracy |
0,1% |
| Thickness resolution ration (at Ta2O5) |
0,1 nm |
| External activation signal |
3,5 – 12 V |
| Stop signal |
“dry contacts” |
| Isolation of signal lines |
2500 V |
| Power consumption |
6 W (220 V, 25 mÀ) |
| Ambient temperature range |
0…50° Ñ |
| Relative humidity at 20° Ñ |
not more than 85% |
| Overall dimensions (without handle) |
110 õ 135 õ 230 mm |
Programming mode
| Quantity of materials |
10 |
| Material density range |
0,1–9,99 g/cm3 |
| Geometric factor |
0,1– 9,99 |
| Quantity of layers |
10 |
| Material thickness range |
0,1 – 999,9 nm |
| Quantity of films |
3 |
| Formula length |
28 digits |
Apparatus:
| External devices communication interface |
RS 232 |
| External activation signal. |
| Stop signal – “dry contacts” |
Application
MICRON-5 is developed to control deposition of multilayer film structures. To start the deposition process operator should load sputtering materials data, layers parameters, and to program film structure formula (to indicate sequence of depositing layers).
MICRON-5 can operate both singularly and as a part of automatic deposition control system. When used separately, the device uses special algorithm loaded by operator. Measuring results are depicted on LCD. The device operates from keyboard, external activation signal and provides stop signal. When used as a part of automatic control system the device sends all measuring data to master computer through series interface.
RS 232 interface
| Transmission rate |
9600 bit/sec |
| Data bits |
8 |
| Stop bit |
1 |
| No parity. |
| LIN protocol |
Software
Software package is developed for Windows 95/98 and supplied together with MICRON-5 device. Appearance of the device in operation mode is shown below.
Please contact us for more information about MICRON-5.
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