IZOVAC offers its Customers engineering services to transfer manual and
semi-automatic operation of vacuum equipment to fully automated operation based
on WAGO microcontroller technology and software designed by IZOVAC.
Automated vacuum equipment control system is based on microcontroller and is
designed to ensure man-free operation of pumping system, vacuum valves, locks
and transferring of all system data to the main computer (if required). The key
advantages of our solution are flexibility, reliability, and
adaptability.
Microcontroller systems comprises three main sub-units:
1) Master network controller. Master network controller ensures
fulfillment of the following objectives:
- Cyclical data exchange between input-output modules
- Execution of pumping equipment operation algorithm
- Communication support with equipment computer through industrial network
MODBUS
2) Exchangeable input-output modules (I/O modules) ensure
connection of sensors and execution units, and include galvanic decoupling
circuits and channel status indicators. Modules are classified as following:
- Digital input module connect
any 24V and 220V digital field devices, and dry contact sensors.
- Digital output module connect
24V or 220V execution units.
- Analogue input module receives signals from analogue sensors with
standardized values of 0-10 V.
3) Service modules.
- End module completes the internal data circuit and ensures correct data
flow. End module is placed onto the whole assembly once all bus couplers and
I/O modules are connected.
4) Power supply modules. The supply modules provide field side power to
several I/O modules, located immediately after supply module.
Proposed system can operate in three different modes:
- Manual mode checks wiring, sensor and executed units’ connection and adjustment procedures.
- Automatic mode is designed to automate execution of
all pumping procedures and ensures the presence of pre-set vacuum condition during
deposition processes.
- Semi-automatic (step-by-step) mode is also designed to safely execute necessary
maintenance and servicing procedures. During this mode of operation special
part of software prevents unpremeditated activation of executing units
(sputtering sources, power supply units, etc.). An operator can manually
control the pumping process, and also move carriage during servicing.

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To submit an order for Vacuum Control System the following
information should be supplied to IZOVAC:
- List of vacuum equipment with technical data and
specified quantity (sensors, executing units).
- Power ratings and operating voltage for executing
units and sensors.
- Sequence (algorithm) of equipment operation,
including pumping process, maintenance procedures, and possible emergency
cases.
- Schematic mnemonic drawing. This drawing will be used
to design real mnemonic scheme of real-time equipment operation.
- List of messages that should be displayed in case of
emergency situations.
- Help menu for equipment operator.
Please contact us for additional information.
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