Izovac has developed and optimized the technological processes for creating
anti-reflection conducting ITO films designed for imaging displays. The films are designed to protect users from
electromagnetic radiation and have the reflectance R ≤ 0,2 % for spectrum range
λ=470 - 670 nm.
The ITO layers are deposited by ion-beam and dual magnetron sputtering in
vacuum.
Four-layer anti-reflection conducting coating containing ITO consists of
alternating layers of indium oxide and silicon oxide of non-equal λ/4 optical
thickness with transmittance T=(88-90)%.
Deposition process is performed on Izovac vacuum coating equipment using the ion-beam source IBSS or the IzoMag dual magnetron. The quality control is executed with special software designed by IZOVAC and loaded on industrial computer. This allows to create optical films with pre-set thickness and composition materials in automatic mode.
ITO coatings are formed by ion-beam or magnetron sputtering in oxygen/argon
gas mixture atmosphere from the 95% In and 5 % Sn alloy. Gas mixture is
optimized to get the ITO coating with refractive index n = 2,0-2,1, absorption A =
0,002, and specific resistance R□ = (90 - 160) Ohm/□ with required thickness.
IZOVAC also possesses technology for creating of low resistance conductive
coatings with specific resistance R□ < 10 Ohm/□ . Such coatings are used in LCD
production and other hi-tech products that contain transparent electrode
structure. |